Title :
A layered SAW based NO2 sensor with a copper phthalocyanine selective layer
Author :
Ippolito, Samuel J. ; Kalantar-Zadeh, Kourosh ; Wlodarski, Wojtek ; Galatsis, Kosmas ; Fischer, Wolf J. ; Berger, Olena ; Stab, Helmut
Author_Institution :
Sch. of Electr. & Comput. Eng., RMIT Univ., Melbourne, Vic., Australia
Abstract :
A multi-layered surface acoustic wave (SAW) transducers have been employed for nitrogen dioxide gas sensing applications. The structure composes of a SiO2 guiding layer deposited on a 90° rotated ST-cut quartz crystal substrate with a thin film of copper phthalocyanine acting as the selective layer. The dominant mode of acoustic propagation in the sensor is a combination of mainly a shear and a longitudinal displacement types. Such a structure has the advantage of confining the acoustic wave energy to the surface of the device, which increases the sensitivity of the system.
Keywords :
acoustic wave propagation; copper compounds; gas sensors; silicon compounds; surface acoustic wave transducers; surface acoustic waves; thin films; Al2O3; NO2 sensor; NiO2; SAW; SiO2; acoustic propagation; acoustic wave energy; copper phthalocyanine; guiding layer; longitudinal displacement type; multilayered surface acoustic wave transducers; nitrogen dioxide gas sensing; rotated ST-cut quartz crystal substrate; sensitivity; shear displacement type; thin film; Acoustic propagation; Acoustic sensors; Acoustic transducers; Acoustic waves; Copper; Nitrogen; Sputtering; Substrates; Surface acoustic wave devices; Surface acoustic waves;
Conference_Titel :
Optoelectronic and Microelectronic Materials and Devices, 2002 Conference on
Print_ISBN :
0-7803-7571-8
DOI :
10.1109/COMMAD.2002.1237218
