Title :
A 5-volt contactless array 256 kbit flash EEPROM technology
Author :
Gill, M. ; Cleavelin, R. ; Lin, S. ; D´Arrigo, I. ; Santin, G. ; Shah, Parikshit ; Nguyen, A. ; Esquivel, J. ; Riemenschneider, B. ; Paterson, J.
Author_Institution :
Texas Instrum. Inc., Houston, TX, USA
Abstract :
A contactless cell array technology has been developed for a single-power-supply 5V-only CMOS flash EEPROM (electrically erasable programmable read-only memory). The technology´s suitability for VLSI memories has been demonstrated by a 256-kb flash EEPROM test vehicle. This low-current approach has been realized with cell area and cost comparable to those of the recently reported dual-power-supply flash EEPROMs.<>
Keywords :
CMOS integrated circuits; PROM; VLSI; integrated circuit technology; integrated memory circuits; 256 kbit; 5 V; VLSI memories; cell area; contactless cell array technology; cost; electrically erasable programmable read-only memory; flash EEPROM; low-current; single-power-supply; CMOS technology; Costs; EPROM; Instruments; Nonvolatile memory; Power supplies; Secondary generated hot electron injection; Tunneling; Very large scale integration; Voltage;
Conference_Titel :
Electron Devices Meeting, 1988. IEDM '88. Technical Digest., International
Conference_Location :
San Francisco, CA, USA
DOI :
10.1109/IEDM.1988.32847