Title :
Recent advances in UV and VUV cleaning of optical materials
Author :
Kane, D.M. ; Fernandes, A.J. ; Hirschausen, D. ; Pleasants, S. ; Ward, B.K.
Author_Institution :
Dept. of Phys., Macquarie Univ., Sydney, NSW, Australia
Abstract :
An overview is given of recent achievements of the Materials Processing Branch of the Short Wavelengths and Interactions with Materials (SWIM) program at Macquarie University. This research focuses on using short-pulsed UV lasers and other novel VUV sources to clean small particles (including sub-micron particles) and hydrocarbons from optical, optoelectronic and photonic materials.
Keywords :
high-speed optical techniques; laser materials processing; optical materials; surface cleaning; Macquarie University; Materials Processing Branch; Short Wavelengths and Interactions with Materials program; VUV cleaning; VUV sources; hydrocarbons; optical materials; optoelectronic materials; photonic materials; short pulsed UV lasers; small particles cleaning; submicron particles; Chemical lasers; Cleaning; Glass; Laser ablation; Laser beams; Laser theory; Optical attenuators; Optical materials; Optical microscopy; Optical pulses;
Conference_Titel :
Optoelectronic and Microelectronic Materials and Devices, 2002 Conference on
Print_ISBN :
0-7803-7571-8
DOI :
10.1109/COMMAD.2002.1237228
