A self-contained CMOS integrated pH sensor

Author

Hon-Sum Wong ; White, M.H.

Author_Institution

Sherman Fairchild Center for Solid State Studies, Lehigh Univ., Bethlehem, PA, USA

fYear

1988

fDate

11-14 Dec. 1988

Firstpage

658

Lastpage

661

Abstract

The authors report the design and evaluation of a self-contained CMOS integrated ISFET (ion-sensitive field effect transistor) pH sensor. They demonstrate two technological solutions for the implementation of a microelectronic ISFET pH sensor: (1) a standard-CMOS-compatible process for fabricating the ISFET and CMOS analog circuits on the same chip has been developed and (2) the electrical reference contact to the electrolyte has been integrated on the same chip as the ISFET by a differential sensing circuit technique.<>

Keywords

CMOS integrated circuits; electric sensing devices; insulated gate field effect transistors; integrated circuit technology; pH measurement; CMOS analog circuits; CMOS integrated ISFET; IC technology; differential sensing circuit technique; electrical reference contact; ion-sensitive field effect transistor; microelectronic ISFET pH sensor; self-contained CMOS integrated pH sensor; standard-CMOS-compatible process; technological solutions; Chemical sensors; Chemical technology; Contacts; Differential amplifiers; Electrodes; FETs; Integrated circuit technology; Microelectronics; Temperature sensors; Threshold voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Electron Devices Meeting, 1988. IEDM '88. Technical Digest., International

Conference_Location

San Francisco, CA, USA

ISSN

0163-1918

Type

conf

DOI

10.1109/IEDM.1988.32899

Filename

32899