Title :
A self-contained CMOS integrated pH sensor
Author :
Hon-Sum Wong ; White, M.H.
Author_Institution :
Sherman Fairchild Center for Solid State Studies, Lehigh Univ., Bethlehem, PA, USA
Abstract :
The authors report the design and evaluation of a self-contained CMOS integrated ISFET (ion-sensitive field effect transistor) pH sensor. They demonstrate two technological solutions for the implementation of a microelectronic ISFET pH sensor: (1) a standard-CMOS-compatible process for fabricating the ISFET and CMOS analog circuits on the same chip has been developed and (2) the electrical reference contact to the electrolyte has been integrated on the same chip as the ISFET by a differential sensing circuit technique.<>
Keywords :
CMOS integrated circuits; electric sensing devices; insulated gate field effect transistors; integrated circuit technology; pH measurement; CMOS analog circuits; CMOS integrated ISFET; IC technology; differential sensing circuit technique; electrical reference contact; ion-sensitive field effect transistor; microelectronic ISFET pH sensor; self-contained CMOS integrated pH sensor; standard-CMOS-compatible process; technological solutions; Chemical sensors; Chemical technology; Contacts; Differential amplifiers; Electrodes; FETs; Integrated circuit technology; Microelectronics; Temperature sensors; Threshold voltage;
Conference_Titel :
Electron Devices Meeting, 1988. IEDM '88. Technical Digest., International
Conference_Location :
San Francisco, CA, USA
DOI :
10.1109/IEDM.1988.32899
