Title :
Laboratory and factory automation for VLSI development and mass production
Author :
Shibayama, K. ; Akasaka, Y.
Author_Institution :
Mitsubishi Electr. Corp., Hyogo, Japan
Abstract :
The authors present a concept for automation in VLSI fabrication and examples of both the automated laboratory line and the mass production line. Particular attention is given to the aims of and items for automation, the system design for laboratory automation, the CAPS (computer-aided processing system) design, the computer hierarchy of the factory line, and the data acquisition and analysis system.<>
Keywords :
CAD/CAM; VLSI; factory automation; integrated circuit manufacture; integrated circuit technology; CAPS; CIM; VLSI development; VLSI fabrication; aims of automation; automated laboratory line; computer hierarchy; computer integrated manufacturing; computer-aided processing system; data acquisition and analysis system; factory automation; factory line; laboratory automation; mass production line; system design; Data acquisition; Design automation; Fabrication; Laboratories; Manufacturing automation; Mass production; Process design; Production facilities; System analysis and design; Very large scale integration;
Conference_Titel :
Electron Devices Meeting, 1988. IEDM '88. Technical Digest., International
Conference_Location :
San Francisco, CA, USA
DOI :
10.1109/IEDM.1988.32917
