DocumentCode :
2155860
Title :
MEMS component technology
Author :
Hayden, J. ; Lakshminarayanan, B.
fYear :
2005
fDate :
17-17 June 2005
Firstpage :
917
Lastpage :
917
Abstract :
Presents an abstract for the session paper for the above titled paper.
Keywords :
Complexity theory; Micromechanical devices; Radiofrequency microelectromechanical systems; Tunable circuits and devices;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Microwave Symposium Digest, 2005 IEEE MTT-S International
Conference_Location :
Long Beach, CA
ISSN :
01490-645X
Print_ISBN :
0-7803-8845-3
Type :
conf
DOI :
10.1109/MWSYM.2005.1516771
Filename :
1516771
Link To Document :
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