Title :
A novel MEMS impedance tuner simultaneously optimized for maximum impedance range and power handling
Author :
Lu, Yumin ; Katehi, Linda P B ; Peroulis, Dimitrios
Author_Institution :
Dept. of Electr. & Comput. Eng., Michigan Univ., Ann Arbor, MI, USA
Abstract :
This paper introduces a novel design technique for developing microwave MEMS impedance tuners. Unlike existing designs we simultaneously optimize both the impedance coverage and power handling of the tuner. This allows the tuner to be used in real-life load-pull systems where power handling is equally important to impedance tuning. We further increase the power handling by utilizing contact-less MEMS varactors that can reliably handle more than 3.5 W of power. These principles are demonstrated with a 30 GHz tuner that exhibits very wide impedance tuning and an improvement of 4.5 times (compared to conventional MEMS designs) in terms of the power it can deliver.
Keywords :
circuit tuning; impedance matching; micromechanical devices; microwave circuits; varactors; 30 GHz; MEMS capacitor; MEMS impedance tuner; contact-less MEMS varactors; impedance tuning; load-pull systems; microwave tuners; power handling; Capacitors; Design optimization; Impedance; Micromechanical devices; Microswitches; Power transmission lines; Radio frequency; Switches; Tuners; Varactors;
Conference_Titel :
Microwave Symposium Digest, 2005 IEEE MTT-S International
Print_ISBN :
0-7803-8845-3
DOI :
10.1109/MWSYM.2005.1516775
