Multi-port RF MEMS waveguide switch

In this paper, for the first time, a novel multi port C-type RF MEMS waveguide switch is investigated. The switch is well suited to high power redundancy switch matrices for satellite communication and can be easily extended to millimeter wave applications. The switch is a 4-port waveguide device that incorporates four sets of MEMS actuators and possesses two different operating states. The use of unique bi-layer curled electrostatic actuators, results in a very good RF performance with an isolation of 36-40 dB and a return loss of -20dB over a 1GHz bandwidth at satellite Ku band.