Title :
Variable MEMS-based inductors fabricated from PECVD silicon nitride
Author :
Dell, J.M. ; Winchester, K. ; Musca, C.A. ; Antoszewski, J. ; Faraone, L.
Author_Institution :
Sch. of Electr., Electron. & Comput. Eng., Western Australia Univ., Crawley, WA, Australia
Abstract :
This paper presents the implementation of inductors for on-chip integration with RF electronics. The inductors were fabricated using silicon bulk micromachining to form a micro-electro-mechanical system (MEMS) that is free from eddy-current losses found in spiral inductors formed using conventional silicon processing. By using the fabrication approach developed here, the resulting inductors are electrically tunable with the application of low DC bias voltages.
Keywords :
inductors; micromachining; micromechanical devices; plasma CVD; silicon compounds; PECVD silicon nitride; RF electronics; SiN; micro-electro-mechanical system; on-chip integration; silicon bulk micromachining; variable MEMS-based inductors; Consumer electronics; Costs; Fabrication; Inductors; Micromechanical devices; Photonics; Radio frequency; Silicon; Space technology; Spirals;
Conference_Titel :
Optoelectronic and Microelectronic Materials and Devices, 2002 Conference on
Print_ISBN :
0-7803-7571-8
DOI :
10.1109/COMMAD.2002.1237315
