Title :
Optical and membrane modelling in a MEMS hyperspectral imaging system
Author :
Wehner, J.G.A. ; Martyniuk, M. ; Antoszewski, J. ; Musca, C.A. ; Dell, J.M. ; Faraone, L.
Author_Institution :
Western Australia Univ., Nedlands, WA, Australia
Abstract :
Hyperspectral imaging using micro-electro-mechanical systems (MEMS) is investigated. A Fabry-Perot cavity is created using a silicon nitride membrane suspended over a variable length air gap, to support a distributed Bragg reflector. Models of membrane behaviour and reflector optical performance are given.
Keywords :
distributed Bragg reflectors; infrared detectors; infrared imaging; micromechanical devices; optical design techniques; optical filters; silicon compounds; Fabry-Perot cavity; MEMS; MEMS hyperspectral imaging; SiN; distributed Bragg reflector; membrane modelling; micro-electro-mechanical systems; optical modelling; silicon nitride membrane; Biomembranes; Hyperspectral imaging; Hyperspectral sensors; Infrared detectors; Micromechanical devices; Optical filters; Optical refraction; Optical sensors; Reflectivity; Resonance;
Conference_Titel :
Optoelectronic and Microelectronic Materials and Devices, 2002 Conference on
Print_ISBN :
0-7803-7571-8
DOI :
10.1109/COMMAD.2002.1237318
