Title :
Design of monolithic BiCMOS open-loop detection circuit for MEMS capacitance accelerometer
Author :
Wang, Yuesheng ; Xu, Shiliu ; Liu, Luncai ; Li, Kaicheng
Author_Institution :
Coll. of Opto-Electron. Eng., Chongqing Univ., Chongqing, China
Abstract :
A novel monolithic BiCMOS open-loop detection circuit for capacitive MEMS accelerometers was presented. It has been developed in 2 ¿m CMOS process. The tested results were as follows. Noise was 1 mg/¿Hz, power was smaller than 10 mW, supply voltage was as low as 5 V, and there is a 2-pole filter on chip.
Keywords :
BiCMOS integrated circuits; accelerometers; capacitive sensors; detector circuits; filters; integrated circuit design; integrated circuit noise; microsensors; 2-pole filter; CMOS process; capacitive MEMS accelerometers; monolithic BiCMOS open-loop detection circuit; noise; supply voltage; voltage 5 V; Acceleration; Accelerometers; BiCMOS integrated circuits; Capacitance; Circuit noise; Clocks; Frequency conversion; Micromechanical devices; Signal to noise ratio; Voltage; BiCMOS; capacitance accelerometer; detection circuit; open-loop;
Conference_Titel :
Solid-State and Integrated-Circuit Technology, 2008. ICSICT 2008. 9th International Conference on
Conference_Location :
Beijing
Print_ISBN :
978-1-4244-2185-5
Electronic_ISBN :
978-1-4244-2186-2
DOI :
10.1109/ICSICT.2008.4735067
