The future of MEMS in energy technologies

Author

Tien, Norman C. ; Ongkodjojo, Andojo ; Roberts, Robert C. ; Li, Dachao

fYear

2008

fDate

20-23 Oct. 2008

Firstpage

2452

Lastpage

2455

Abstract

The 21^st century requires innovative solutions to meet the ever increasing demand for ultra portable and highly efficient energy technologies. Micro-electro-mechanical Systems (MEMS) have shown significant promise in providing robust, low-cost transduction capabilities. MEMS sensors and actuators are ideally suited for small-scale energy harvesting and power generation applications where overall device dimensions are critical. Furthermore, MEMS technology can also be harnessed for large scale energy applications by augmenting these systems with sensing and actuation capabilities in order to improve energy efficiency and reduce costs. This paper highlights some current MEMS research for energy applications and also explores some areas of the energy industry which might benefit from integration with MEMS.

Keywords

energy harvesting; micromechanical devices; power supplies to apparatus; MEMS; energy harvesting; energy industry; energy technology; microelectromechanical Systems; power generation; Actuators; Batteries; Capacitors; Chemicals; Consumer electronics; Costs; Large-scale systems; Micromechanical devices; Power generation; Resonance;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State and Integrated-Circuit Technology, 2008. ICSICT 2008. 9th International Conference on

Conference_Location

Beijing

Print_ISBN

978-1-4244-2185-5

Electronic_ISBN

978-1-4244-2186-2

Type

conf

DOI

10.1109/ICSICT.2008.4735075

Filename

4735075