Title :
A very small active-matrix LCD panel with monolithically integrated peripheral driver circuits
Author :
Emoto, F. ; Senda, K. ; Fujii, E. ; Nakamura, A. ; Yamamoto, A. ; Uemoto, Y. ; Kamimura, T. ; Kano, G.
Author_Institution :
Matsushita Electr. Corp., Osaka, Japan
Abstract :
The authors demonstrate a very small active-matrix LCD (liquid crystal display) panel, 21 mm*25 mm, having driver circuits on a single quartz substrate. In order to increase the channel mobility of the TFT, a novel technology for solid-phase growth of the polysilicon film on the quartz substrate was developed. The typical subthreshold characteristics of the fabricated p- and n-channel TFTs in the polysilicon film are reported. An LCD panel containing the peripheral driver circuits and the active matrix has been successfully fabricated by the conventional CMOS process. The output signal waveforms of the fabricated horizontal shift register are shown.<>
Keywords :
CMOS integrated circuits; driver circuits; liquid crystal displays; thin film transistors; 21 mm; 25 mm; CMOS process; LCD panel; Si-SiO/sub 2/; TFT; active-matrix; channel mobility improvement; horizontal shift register; liquid crystal display; monolithically integrated drivers; peripheral driver circuits; polysilicon film; quartz substrate; solid-phase growth; subthreshold characteristics; thin film transistor; Active matrix liquid crystal displays; Active matrix technology; CMOS process; CMOS technology; Driver circuits; Integrated circuit technology; Liquid crystal displays; Shift registers; Substrates; Thin film transistors;
Conference_Titel :
Electron Devices Meeting, 1988. IEDM '88. Technical Digest., International
Conference_Location :
San Francisco, CA, USA
DOI :
10.1109/IEDM.1988.32950
