Title :
Integrated CMOS-MEMS technology and its applications
Author :
Morimura, Hiroki ; Mutoh, Shinichiro ; Ishii, Hiromu ; Machida, Katsuyuki
Author_Institution :
NTT Microsyst. Integration Labs., Kanagawa, Japan
Abstract :
The paper describes integrated CMOS-MEMS technology and its applications. We discuss the features of integrated complementary metal-oxide-semi-conductor-microelectromechanical systems (CMOS- MEMS). The prospect of this integration is also presented. A MEMS fingerprint sensor and a low-voltage radio frequency (RF) CMOS-MEMS switch are the case studies discussed. In conclusion, it is confirmed that the integrated CMOS-MEMS technology will pave the way for the more than Moore technology.
Keywords :
CMOS integrated circuits; large scale integration; microsensors; microswitches; radiofrequency integrated circuits; MEMS; complementary metal-oxide-semiconductor LSI; fingerprint sensor; microelectromechanical systems; radio frequency switch; Accelerometers; CMOS technology; Fingerprint recognition; Integrated circuit technology; Large scale integration; Microelectromechanical devices; Micromechanical devices; Radio frequency; Radiofrequency integrated circuits; Switches;
Conference_Titel :
Solid-State and Integrated-Circuit Technology, 2008. ICSICT 2008. 9th International Conference on
Conference_Location :
Beijing
Print_ISBN :
978-1-4244-2185-5
Electronic_ISBN :
978-1-4244-2186-2
DOI :
10.1109/ICSICT.2008.4735089
