Title :
3-D microinductor fabricated by using MEMS technology
Author :
Fang, Dong-Ming ; Zhang, Hai-Xia ; Zha, Xiao-Lin
Author_Institution :
Inst. of Microelectron., Peking Univ., Beijing, China
Abstract :
A high-performance three-dimensional (3-D) microinductor was fabricated by using MEMS technology. This inductor has an air core and copper coils. The measurement results show that this inductor has high quality (Q) factor over wide range of operating frequency and high fres (self-resonant frequency). The maximum Q-factor of this inductor is 38 (@6 GHz) and the inductance is 1.81 nH at peak-Q frequency.
Keywords :
Q-factor; inductors; micromechanical devices; MEMS technology; Q-factor; air core; copper coils; three-dimensional microinductor; Coils; Conductors; Fabrication; Inductance; Inductors; Magnetic cores; Micromechanical devices; Q factor; Radio frequency; Solenoids;
Conference_Titel :
Solid-State and Integrated-Circuit Technology, 2008. ICSICT 2008. 9th International Conference on
Conference_Location :
Beijing
Print_ISBN :
978-1-4244-2185-5
Electronic_ISBN :
978-1-4244-2186-2
DOI :
10.1109/ICSICT.2008.4735095