DocumentCode :
2156923
Title :
3-D microinductor fabricated by using MEMS technology
Author :
Fang, Dong-Ming ; Zhang, Hai-Xia ; Zha, Xiao-Lin
Author_Institution :
Inst. of Microelectron., Peking Univ., Beijing, China
fYear :
2008
fDate :
20-23 Oct. 2008
Firstpage :
2484
Lastpage :
2487
Abstract :
A high-performance three-dimensional (3-D) microinductor was fabricated by using MEMS technology. This inductor has an air core and copper coils. The measurement results show that this inductor has high quality (Q) factor over wide range of operating frequency and high fres (self-resonant frequency). The maximum Q-factor of this inductor is 38 (@6 GHz) and the inductance is 1.81 nH at peak-Q frequency.
Keywords :
Q-factor; inductors; micromechanical devices; MEMS technology; Q-factor; air core; copper coils; three-dimensional microinductor; Coils; Conductors; Fabrication; Inductance; Inductors; Magnetic cores; Micromechanical devices; Q factor; Radio frequency; Solenoids;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Solid-State and Integrated-Circuit Technology, 2008. ICSICT 2008. 9th International Conference on
Conference_Location :
Beijing
Print_ISBN :
978-1-4244-2185-5
Electronic_ISBN :
978-1-4244-2186-2
Type :
conf
DOI :
10.1109/ICSICT.2008.4735095
Filename :
4735095
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2156923
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