Title :
Merging SoC and LOC together
Author :
Li, Zhihong ; Ji, Xu ; Wang, Lu ; Xi, Jianzhong
Author_Institution :
Nat. Key Lab. of Nano/Micro Fabrication Technol., Peking Univ., Beijing, China
Abstract :
A promising combination of the semiconductor integrated system-on-a-chip (SoC) with the lab-on-a-chip (LOC) is brought in this paper. In this paper, we propose a new technology which enables monolithic integration of the self-assembled biological system, the MEMS structure, the microfluidic system, and CMOS electronic circuits together. Utilizing this approach, more functionality is introduced into the SoC, while the LOC becomes more intelligent and controllable. A post-CMOS fabrication approach that meets the requirements is demonstrated to validate the idea.
Keywords :
CMOS integrated circuits; bioMEMS; lab-on-a-chip; microfluidics; self-assembly; system-on-chip; CMOS electronic circuits; LOC; MEMS structure; SoC; lab-on-a-chip; microfluidic system; monolithic integration; self-assembled biological system; semiconductor integrated system-on-a-chip; Biological systems; CMOS technology; Electronic circuits; Integrated circuit technology; Lab-on-a-chip; Merging; Microfluidics; Micromechanical devices; Monolithic integrated circuits; System-on-a-chip;
Conference_Titel :
Solid-State and Integrated-Circuit Technology, 2008. ICSICT 2008. 9th International Conference on
Conference_Location :
Beijing
Print_ISBN :
978-1-4244-2185-5
Electronic_ISBN :
978-1-4244-2186-2
DOI :
10.1109/ICSICT.2008.4735107
