Title :
A surface plasmon resonance(SPR)sensor chip integrating prism array based on polymer microfabrication
Author :
Geng, Zhao-xin ; Ji, Xu ; Lou, Xia ; Li, Qing ; Wang, Wei ; Li, Zhi-hong
Author_Institution :
Nat. Key Lab. of Nano/Micro Fabrication Technol., Peking Univ., Beijing, China
Abstract :
The prototype of a prism-coupled Kretschmann surface plasmon resonance (SPR) chip was fabricated by suing bulk silicon micromachining and polymer replication, and the chip is constructed with the polymer-prism array, metal layer and micro-channel. The performance of PDMS SPR chip was investigated at different incident wavelengths, when the chip is applied to test samples, including air, water and ethanol. As the light source was at 650nm the resonance angles in air, water and ethanol were about 48.14°, 76.6° and 77.1°, respectively. Resonance angles decrease almost in linearity with refractive index of PDMS increasing. The obtained SPR angles are approximately consistent with the theoretical ones. This polymer micro-prism array-coupled SPR chip continues to evolve as an elegant and powerful analytical method with unique capabilities in biosensors.
Keywords :
biosensors; chemical sensors; integrated optics; micro-optics; micromachining; microsensors; optical prisms; polymers; surface plasmon resonance; PDMS; biosensors; polymer microfabrication; polymer replication; prism array integration; prism-coupled Kretschmann surface plasmon resonance chip; suing bulk silicon micromachining; surface plasmon resonance sensor chip; wavelength 650 nm; Ethanol; Light sources; Micromachining; Plasmons; Polymers; Prototypes; Resonance; Silicon; Testing; Water resources;
Conference_Titel :
Solid-State and Integrated-Circuit Technology, 2008. ICSICT 2008. 9th International Conference on
Conference_Location :
Beijing
Print_ISBN :
978-1-4244-2185-5
Electronic_ISBN :
978-1-4244-2186-2
DOI :
10.1109/ICSICT.2008.4735109
