• DocumentCode
    2157831
  • Title

    Ultra-low-loss single-mode Si3N4 waveguides with 0.7 dB/m propagation loss

  • Author

    Bauters, Jared F. ; Heck, Martijn J R ; John, Demis D. ; Tien, Ming-Chun ; Li, Wenzao ; Barton, Jon S. ; Blumenthal, Daniel J. ; Bowers, John E. ; Leinse, Arne ; Heideman, René G.

  • Author_Institution
    Eng. Sci. Building, Univ. of California, Santa Barbara, CA, USA
  • fYear
    2011
  • fDate
    18-22 Sept. 2011
  • Firstpage
    1
  • Lastpage
    3
  • Abstract
    We report an approach to make ultra-low-loss waveguides using fixed-index-contrast stoichiometric Si3N4. A record low single-mode propagation loss of 0.70 ± 0.02 dB/m was achieved while multi-mode designs have fundamental mode loss as low as 0.43 ± 0.04 dB/m.
  • Keywords
    light propagation; optical planar waveguides; silicon compounds; stoichiometry; Si3N4; fixed-index-contrast stoichiometric; fundamental mode loss; low single-mode propagation loss; ultralow-loss single-mode planar waveguide technology; Loss measurement; Optical reflection; Optical scattering; Optical waveguides; Planar waveguides; Propagation losses;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optical Communication (ECOC), 2011 37th European Conference and Exhibition on
  • Conference_Location
    Geneva
  • ISSN
    Pending
  • Print_ISBN
    978-1-4577-1918-9
  • Type

    conf

  • Filename
    6065921