Title :
Design for manufacturing layout analyses correlate layout to physico-chemical yield loss mechanisms
Author :
Tan, Cheng Peng ; Congshu Zhou ; Yi Tian ; Chang Liu ; Hein-Mun Lam ; Jian Zhang ; Lu, Min
Author_Institution :
GLOBALFOUNDRIES Singapore Pte. Ltd., Singapore, Singapore
Abstract :
We introduce a case-based learning workflow in the foundry for managing layout weakpoints and implementing layout analyses checks. In this work, we describe case studies that demonstrate how layout analyses can be used to detect layout weakpoints and correlate them to actual physico-chemical mechanisms behind defects observed on silicon.
Keywords :
elemental semiconductors; integrated circuit design; integrated circuit yield; silicon; Si; case-based learning workflow; foundry; layout weakpoints detection; manufacturing layout analysis; physicochemical yield loss mechanisms; silicon; Dielectrics; Films; Foundries; Layout; Manufacturing; Metals;
Conference_Titel :
Custom Integrated Circuits Conference (CICC), 2013 IEEE
Conference_Location :
San Jose, CA
DOI :
10.1109/CICC.2013.6658535