Title :
Opto controlled substrate losses in a coplanar waveguide on HR-Si
Author :
Poesen, G. ; Koers, G. ; Stiens, J. ; Carchon, G. ; Raedt, W. De ; Vounckx, R.
Author_Institution :
Lab for Micro- & Photonelectron., Vrije Univ. Brussel, Brussels, Belgium
Abstract :
The development of opto-electronic RF switch for millimeter wave applications designed in a multilayer thin-film multichip module technology on HR-Si is discussed in this paper. Insertion loss measurements of a CPW line under illumination demonstrate a contrast of about 40 dB at 100GHz. For the interaction between RF-signal and the photo-induced conductivity, different models have been developed. A 3D model is used in EM-solvers to predict and study the impact of the photoconductivity modulation. A lumped model is developed as well to make the integration into circuit simulators.
Keywords :
coplanar waveguides; elemental semiconductors; loss measurement; lumped parameter networks; microwave switches; millimetre wave devices; multichip modules; optoelectronic devices; photoconductivity; silicon; 100 GHz; HR-Si; MCM-D technology; RF-signal; Si; circuit simulators; coplanar waveguide; insertion loss measurements; lossy media; lumped model; millimeter wave applications; millimeter wave devices; multilayer thin-film multichip module technology; opto controlled substrate losses; opto-electronic RF switch; optoelectronic devices; photo-induced conductivity; photoconductivity modulation; Coplanar waveguides; Insertion loss; Millimeter wave measurements; Millimeter wave technology; Multichip modules; Nonhomogeneous media; Radio frequency; Substrates; Switches; Transistors;
Conference_Titel :
Microwave Symposium Digest, 2005 IEEE MTT-S International
Print_ISBN :
0-7803-8845-3
DOI :
10.1109/MWSYM.2005.1516947