Title :
Infrared Mapping of Material and Doping Contrasts in Microelectronic Devices at Nanoscale Spatial Resolution
Author :
Huber, A. ; Wittborn, J. ; Keilmann, F. ; Hillenbrand, R.
Author_Institution :
Max-Planck-Inst. fur Biochem., Martinsried
Abstract :
In this paper we demonstrate that infrared scattering-type scanning near-field optical microscopy (s-SNOM) allows mapping of different materials and electron concentrations in cross-sectional samples of industrial integrated circuit device structures at nanoscale spatial resolution.
Keywords :
doping; doping profiles; integrated circuits; nanoelectronics; nanostructured materials; near-field scanning optical microscopy; SNOM; electron concentration; industrial integrated circuit device structure; infrared mapping; infrared scattering; microelectronic device; nanoscale spatial resolution; scanning near-field optical microscopy; Doping; Electron optics; Integrated optics; Microelectronics; Nanoscale devices; Optical devices; Optical materials; Optical microscopy; Optical scattering; Spatial resolution;
Conference_Titel :
Lasers and Electro-Optics, 2007 and the International Quantum Electronics Conference. CLEOE-IQEC 2007. European Conference on
Conference_Location :
Munich
Print_ISBN :
978-1-4244-0931-0
Electronic_ISBN :
978-1-4244-0931-0
DOI :
10.1109/CLEOE-IQEC.2007.4386384
