Title :
High-power microwave discharge for producing large-area surface-wave plasmas
Author :
Zhaoquan, Chen ; Minghai, Liu ; Wei, Chen ; Zhiqing, Luo ; Liang, Tang ; Chaohui, Lan ; Xiwei, Hu
Author_Institution :
Coll. of Electr. & Electron. Eng., Huazhong Univ. of Sci. & Technol., Wuhan
Abstract :
The theory of surface-wave discharge is introduced. A novel structure of the slot antenna array is designed in this paper, and its excitation is numerical analyzed using dipole-antenna array model and FDTD method, respectively. A microwave discharge experiment is operated with this slot-antenna array, and a numerical simulation is also done with FDTD code using the parameter of plasma from experimental measurement. It is found that the designed slot antenna array can excite effectively the microwave coupling into the cavity, and produce the stable large-area high-density plasma.
Keywords :
dipole antenna arrays; finite difference time-domain analysis; microwave antenna arrays; plasma production; slot antenna arrays; surface discharges; FDTD method; dipole-antenna array; high-power microwave discharge; large-area high-density plasma; large-area surface-wave plasmas; slot antenna array; surface-wave discharge; Antenna arrays; Dipole antennas; Finite difference methods; Microwave antenna arrays; Numerical simulation; Plasma measurements; Plasma simulation; Plasma stability; Slot antennas; Surface discharges;
Conference_Titel :
Antennas, Propagation and EM Theory, 2008. ISAPE 2008. 8th International Symposium on
Conference_Location :
Kunming
Print_ISBN :
978-1-4244-2192-3
Electronic_ISBN :
978-1-4244-2193-0
DOI :
10.1109/ISAPE.2008.4735276
