High-power microwave discharge for producing large-area surface-wave plasmas

Author

Zhaoquan, Chen ; Minghai, Liu ; Wei, Chen ; Zhiqing, Luo ; Liang, Tang ; Chaohui, Lan ; Xiwei, Hu

Author_Institution

Coll. of Electr. & Electron. Eng., Huazhong Univ. of Sci. & Technol., Wuhan

fYear

2008

fDate

2-5 Nov. 2008

Firstpage

569

Lastpage

572

Abstract

The theory of surface-wave discharge is introduced. A novel structure of the slot antenna array is designed in this paper, and its excitation is numerical analyzed using dipole-antenna array model and FDTD method, respectively. A microwave discharge experiment is operated with this slot-antenna array, and a numerical simulation is also done with FDTD code using the parameter of plasma from experimental measurement. It is found that the designed slot antenna array can excite effectively the microwave coupling into the cavity, and produce the stable large-area high-density plasma.

Keywords

dipole antenna arrays; finite difference time-domain analysis; microwave antenna arrays; plasma production; slot antenna arrays; surface discharges; FDTD method; dipole-antenna array; high-power microwave discharge; large-area high-density plasma; large-area surface-wave plasmas; slot antenna array; surface-wave discharge; Antenna arrays; Dipole antennas; Finite difference methods; Microwave antenna arrays; Numerical simulation; Plasma measurements; Plasma simulation; Plasma stability; Slot antennas; Surface discharges;

fLanguage

English

Publisher

ieee

Conference_Titel

Antennas, Propagation and EM Theory, 2008. ISAPE 2008. 8th International Symposium on

Conference_Location

Kunming

Print_ISBN

978-1-4244-2192-3

Electronic_ISBN

978-1-4244-2193-0

Type

conf

DOI

10.1109/ISAPE.2008.4735276

Filename

4735276