DocumentCode

2161310

Title

Ghost Clean System

Author

Iga, Hiroyuki ; Matsue, Hiroshi ; Ishii, Akira ; Miyazaki, Isao

Author_Institution

TOSHIBA Consumer Products Engineering Lab., Japan

fYear

1990

fDate

6-8 Jun 1990

Firstpage

136

Lastpage

137

fLanguage

English

Publisher

ieee

Conference_Titel

Consumer Electronics, 1990. ICCE 90. IEEE 1990 International Conference on

Type

conf

DOI

10.1109/ICCE.1990.665896

Filename

665896