مرکز منطقه ای اطلاع رساني علوم و فناوري

DocumentCode :

2161310

Title :

Ghost Clean System

Author :

Iga, Hiroyuki ; Matsue, Hiroshi ; Ishii, Akira ; Miyazaki, Isao

Author_Institution :

TOSHIBA Consumer Products Engineering Lab., Japan

fYear :

1990

fDate :

6-8 Jun 1990

Firstpage :

136

Lastpage :

137

fLanguage :

English

Publisher :

ieee

Conference_Titel :

Consumer Electronics, 1990. ICCE 90. IEEE 1990 International Conference on

Type :

conf

DOI :

10.1109/ICCE.1990.665896

Filename :

665896

Link To Document :