Title :
A micromachined polyimide aperture for bilayer lipid membrane (BLM)-based biosensors
Author :
Eray, Mete ; Dogan, Numan S. ; Koch, Alan R. ; Moffett, David F. ; Silber, Moris ; Van Wie, Bernard J.
Author_Institution :
Washington State University
Keywords :
Apertures; Biomembranes; Biosensors; Curing; Etching; Lipidomics; Planarization; Polyimides; Silicon; Stability;
Conference_Titel :
Engineering in Medicine and Biology Society, 1993. Proceedings of the 15th Annual International Conference of the IEEE
Print_ISBN :
0-7803-1377-1
DOI :
10.1109/IEMBS.1993.979290
