A micromachined polyimide aperture for bilayer lipid membrane (BLM)-based biosensors

Author

Eray, Mete ; Dogan, Numan S. ; Koch, Alan R. ; Moffett, David F. ; Silber, Moris ; Van Wie, Bernard J.

Author_Institution

Washington State University

fYear

1993

fDate

1993

Firstpage

1569

Lastpage

1570

Keywords

Apertures; Biomembranes; Biosensors; Curing; Etching; Lipidomics; Planarization; Polyimides; Silicon; Stability;

fLanguage

English

Publisher

ieee

Conference_Titel

Engineering in Medicine and Biology Society, 1993. Proceedings of the 15th Annual International Conference of the IEEE

Print_ISBN

0-7803-1377-1

Type

DOI

10.1109/IEMBS.1993.979290

Filename

979290

Link To Document