DocumentCode
2162597
Title
Gate oxide breakdown under Current Limited Constant Voltage Stress
Author
Linder, B.P. ; Stathis, J.H. ; Wachnik, R.A. ; Wu, E. ; Cohen, S.A. ; Ray, A. ; Vayshenker, A.
Author_Institution
Div. of Res., IBM Thomas J. Watson Res. Center, Yorktown Heights, NY, USA
fYear
2000
fDate
13-15 June 2000
Firstpage
214
Lastpage
215
Abstract
Ultra-thin oxide reliability has become an important issue in integrated circuit scaling. Present reliability methodology stresses oxides with a low impedance voltage source. This, though, does not represent the stress under circuit configurations, in which transistors are driven by other transistors. A Current Limited Constant Voltage Stress simulates circuit stress well. Limiting the current during the breakdown event reduces the post-breakdown conduction. Limiting the current to a sufficiently low value may prevent device failure, altogether.
Keywords
electric breakdown; current limited constant voltage stress; device failure; gate oxide breakdown; integrated circuit scaling; ultrathin oxide reliability; Breakdown voltage; Circuit simulation; Current measurement; Electric breakdown; Gate leakage; Impedance; Integrated circuit reliability; Low voltage; Microelectronics; Stress;
fLanguage
English
Publisher
ieee
Conference_Titel
VLSI Technology, 2000. Digest of Technical Papers. 2000 Symposium on
Conference_Location
Honolulu, HI, USA
Print_ISBN
0-7803-6305-1
Type
conf
DOI
10.1109/VLSIT.2000.852830
Filename
852830
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