A physical modeling and long-term measurement of tilting angle drift caused by dielectric surface charging in MEMS micromirrors

Author

Nakajima, Masahiro ; Kuwabara, Kenta ; Ishihara, Takuya ; Sakata, Tsuyoshi ; Usui, Mitsuo ; Nemoto, N. ; Hashimoto, E. ; Yamaguchi, Jun ; Uchiyama, S. ; Jin, Yichao

Author_Institution

NTT Microsyst. Integration Labs., NTT Corp., Atsugi, Japan

fYear

2013

fDate

18-22 Aug. 2013

Firstpage

19

Lastpage

20

Abstract

Dielectric charging of MEMS micromirrors causes tilt angle drift, which is a major reliability problem for telecom applications. In this paper, we propose a physical model of angle drift in a MEMS mirror system considering surface charge motion on dielectric oxide. Good agreement is obtained between the model calculation and experimental results, which suggest that angle drift can be predicted by the proposed model.

Keywords

micro-optomechanical devices; micromirrors; surface charging; MEMS micromirrors; dielectric oxide; dielectric surface charging; long-term measurement; physical modeling; reliability problem; surface charge motion; telecom applications; tilting angle drift; Dielectrics; Electrodes; Micromechanical devices; Micromirrors; Predictive models; Reliability;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical MEMS and Nanophotonics (OMN), 2013 International Conference on

Conference_Location

Kanazawa

ISSN

2160-5033

Print_ISBN

978-1-4799-1512-5

Type

conf

DOI

10.1109/OMN.2013.6659038

Filename

6659038