Title :
A physical modeling and long-term measurement of tilting angle drift caused by dielectric surface charging in MEMS micromirrors
Author :
Nakajima, Masahiro ; Kuwabara, Kenta ; Ishihara, Takuya ; Sakata, Tsuyoshi ; Usui, Mitsuo ; Nemoto, N. ; Hashimoto, E. ; Yamaguchi, Jun ; Uchiyama, S. ; Jin, Yichao
Author_Institution :
NTT Microsyst. Integration Labs., NTT Corp., Atsugi, Japan
Abstract :
Dielectric charging of MEMS micromirrors causes tilt angle drift, which is a major reliability problem for telecom applications. In this paper, we propose a physical model of angle drift in a MEMS mirror system considering surface charge motion on dielectric oxide. Good agreement is obtained between the model calculation and experimental results, which suggest that angle drift can be predicted by the proposed model.
Keywords :
micro-optomechanical devices; micromirrors; surface charging; MEMS micromirrors; dielectric oxide; dielectric surface charging; long-term measurement; physical modeling; reliability problem; surface charge motion; telecom applications; tilting angle drift; Dielectrics; Electrodes; Micromechanical devices; Micromirrors; Predictive models; Reliability;
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2013 International Conference on
Conference_Location :
Kanazawa
Print_ISBN :
978-1-4799-1512-5
DOI :
10.1109/OMN.2013.6659038
