Title :
A time-multiplexed electrostatic drive and sample interface circuit for MEMS optical scanners
Author :
Maruyama, Shoichi ; Konishi, Tsuyoshi ; Machida, Kenji ; Ishihara, Noboru ; Masu, Kazuya ; Fujita, Hideaki ; Toshiyoshi, Hiroshi
Author_Institution :
Inst. of Ind. Sci., Univ. of Tokyo, Tokyo, Japan
Abstract :
We report an interface IC (integrated circuit) to electrostatically drive and measure the tilt-mirror angle by switching the actuator´s port to either the driver or charge-sensing circuit in a time-multiplex manner in a period shorter than the mechanical response time to minimize the disturbance of sensing.
Keywords :
electrostatic actuators; integrated optoelectronics; micro-optomechanical devices; micromirrors; microsensors; optical scanners; optical sensors; optical switches; MEMS optical scanners; actuator port switching; charge-sensing circuit; interface IC; interface integrated circuit; tilt-mirror angle; time-multiplexed electrostatic drive; Actuators; Drives; Integrated circuits; Micromechanical devices; Mirrors; Sensors; Voltage control;
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2013 International Conference on
Conference_Location :
Kanazawa
Print_ISBN :
978-1-4799-1512-5
DOI :
10.1109/OMN.2013.6659039
