Title :
A monolithic surface micromachined Z-axis gyroscope with digital output
Author :
Xuesong Jiang ; Seeger, J.I. ; Kraft, M. ; Boser, Bernhard E.
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., California Univ., Berkeley, CA, USA
Abstract :
A monolithic surface micromachined Z-axis vibratory rate gyroscope with an on-chip A/D converter is fabricated in a monolithic MEMS/circuits technology with 2 /spl mu/m CMOS and 2.25 /spl mu/m-thick mechanical polysilicon. The on-chip position sense circuit uses correlated double sampling to reject 1/f and kT/C noise and resolves 0.02 angstrom displacements. The gyroscope achieves a noise floor of 3/spl deg//sec//spl radic/Hz at atmospheric pressure and operates from a single 5 V supply.
Keywords :
1/f noise; Analog-digital conversion; CMOS integrated circuits; Elemental semiconductors; Gyroscopes; Micromachining; Semiconductor device noise; Silicon; 1/f noise; 2 micron; 2.25 micron; 5 V; CMOS; Si; Z-axis vibratory rate gyroscope; atmospheric pressure; correlated double sampling; digital output; kT/C noise; mechanical polysilicon; noise floor; on-chip A/D converter; on-chip position sense circuit; surface micromachining; Acceleration; Accelerometers; CMOS technology; Capacitors; Circuit noise; Clocks; Electrodes; Gyroscopes; Sampling methods; Switching circuits;
Conference_Titel :
VLSI Circuits, 2000. Digest of Technical Papers. 2000 Symposium on
Conference_Location :
Honolulu, HI, USA
Print_ISBN :
0-7803-6309-4
DOI :
10.1109/VLSIC.2000.852839
