A monolithic surface micromachined Z-axis gyroscope with digital output

Author

Xuesong Jiang ; Seeger, J.I. ; Kraft, M. ; Boser, Bernhard E.

Author_Institution

Dept. of Electr. Eng. & Comput. Sci., California Univ., Berkeley, CA, USA

fYear

2000

fDate

15-17 June 2000

Firstpage

16

Lastpage

19

Abstract

A monolithic surface micromachined Z-axis vibratory rate gyroscope with an on-chip A/D converter is fabricated in a monolithic MEMS/circuits technology with 2 /spl mu/m CMOS and 2.25 /spl mu/m-thick mechanical polysilicon. The on-chip position sense circuit uses correlated double sampling to reject 1/f and kT/C noise and resolves 0.02 angstrom displacements. The gyroscope achieves a noise floor of 3/spl deg//sec//spl radic/Hz at atmospheric pressure and operates from a single 5 V supply.

Keywords

1/f noise; Analog-digital conversion; CMOS integrated circuits; Elemental semiconductors; Gyroscopes; Micromachining; Semiconductor device noise; Silicon; 1/f noise; 2 micron; 2.25 micron; 5 V; CMOS; Si; Z-axis vibratory rate gyroscope; atmospheric pressure; correlated double sampling; digital output; kT/C noise; mechanical polysilicon; noise floor; on-chip A/D converter; on-chip position sense circuit; surface micromachining; Acceleration; Accelerometers; CMOS technology; Capacitors; Circuit noise; Clocks; Electrodes; Gyroscopes; Sampling methods; Switching circuits;

fLanguage

English

Publisher

ieee

Conference_Titel

VLSI Circuits, 2000. Digest of Technical Papers. 2000 Symposium on

Conference_Location

Honolulu, HI, USA

Print_ISBN

0-7803-6309-4

Type

conf

DOI

10.1109/VLSIC.2000.852839

Filename

852839