High-reflectivity, broadband monolithic silicon photonic crystal mirrors on two-axis MEMS scanner by transfer-printing

Author

Jae-Woong Jeong ; Park, Bong-Ryeol ; Hohyun Keum ; Seok Kim ; Rogers, John A. ; Solgaard, Olav

Author_Institution

Dept. of Electr. Eng., Stanford Univ., Stanford, CA, USA

fYear

2013

fDate

18-22 Aug. 2013

Firstpage

23

Lastpage

24

Abstract

We demonstrate a two-axis electrostatic MEMS scanner integrated with high-reflectivity monolithic silicon photonic crystal (PC) mirrors by transfer printing. The PC mirrors show low polarization dependence and reflectivity over 85% in the wavelength range of 1490nm~1505nm and above 90% over the wavelength band of 1550~1570nm. The integration of nanophotonic devices on a MEMS platform with transfer printing enables novel devices with more flexible design and new functionality.

Keywords

elemental semiconductors; integrated optics; micromechanical devices; micromirrors; nanophotonics; optical design techniques; photonic crystals; reflectivity; silicon; Si; high-reflectivity broadband monolithic silicon photonic crystal mirrors; integrated optics; nanophotonic devices; optical design; polarization dependence; transfer printing; two-axis electrostatic MEMS scanner; wavelength 1490 nm to 1505 nm; wavelength 1550 nm to 1570 nm; Fabrication; Micromechanical devices; Mirrors; Optical polarization; Optical reflection; Printing; Reflectivity;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical MEMS and Nanophotonics (OMN), 2013 International Conference on

Conference_Location

Kanazawa

ISSN

2160-5033

Print_ISBN

978-1-4799-1512-5

Type

conf

DOI

10.1109/OMN.2013.6659040

Filename

6659040