DocumentCode
2162984
Title
Assembly of 3D MEMS mirrors and scanners using compliant push pads
Author
Yi Chiu ; Yan-Ting Wu ; Hao-Chiao Hong
Author_Institution
Nat. Chiao Tung Univ., Hsinchu, Taiwan
fYear
2013
fDate
18-22 Aug. 2013
Firstpage
27
Lastpage
28
Abstract
This paper presents a novel assembly technique for 3D micro structures on the substrate. The technique is based on pushing the structure to rotate to a predefined angle by using a micro probe. A compliant push pad is used to fix the position of the assembled structures. No other latching mechanism is necessary and thus the push operation can be significantly simplified. Micro mirrors and scanners assembled by this technique are demonstrated.
Keywords
micro-optomechanical devices; micromirrors; optical scanners; 3D MEMS mirrors; 3D MEMS scanners; 3D microstructures; assembled structures; assembly technique; compliant push pads; micromirrors; microprobe; microscanners; Assembly; Mirrors; Optical device fabrication; Probes; Stress; Three-dimensional displays;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMS and Nanophotonics (OMN), 2013 International Conference on
Conference_Location
Kanazawa
ISSN
2160-5033
Print_ISBN
978-1-4799-1512-5
Type
conf
DOI
10.1109/OMN.2013.6659042
Filename
6659042
Link To Document