Title :
Fabrication and characterization of thin-film nanostructured Lüneburg lens
Author :
Chih-Hung Hsieh ; Jun Xu ; Hanhong Gao ; Fang, Nicholas X. ; Barbastathis, George
Author_Institution :
Dept. of Mech. Eng., Massachusetts Inst. of Technol., Cambridge, MA, USA
Abstract :
A thin-film nanostructured Lüneburg lens with guidance condition correction has been fabricated by patterning a slab of silicon-rods on silicon-on-insulator wafer, and has been characterized using a near-field scanning optical microscope.
Keywords :
elemental semiconductors; lenses; nanopatterning; nanophotonics; nanorods; optical fabrication; optical films; optical microscopy; semiconductor thin films; silicon; silicon-on-insulator; Si; guidance condition correction; near-field scanning optical microscopy; optical fabrication; silicon-on-insulator wafer; silicon-rods; slab nanopatterning; thin-film nanostructured Luneburg lens; Adaptive optics; Finite difference methods; Indexes; Lenses; Optical device fabrication; Time-domain analysis; Nanostructured Lüneburg lens; near-field scanning optical microscope; proximity effect;
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2013 International Conference on
Conference_Location :
Kanazawa
Print_ISBN :
978-1-4799-1512-5
DOI :
10.1109/OMN.2013.6659046
