Title :
Wavelength engineering of VCSELS based on MEMS technologies
Author_Institution :
Photonics Integration Syst. Res. Center, Tokyo Inst. of Technol., Tokyo, Japan
Abstract :
Our research activities on the wavelength control of MEMS VCSELs are reviewed. This paper explores the potential and challenges for wavelength engineering of VCSELs, including the wavelength athermalization and wavelength tuning. We demonstrate the athermal operation and wavelength tuning of 850nm-GaAs-VCSELs with a thermally actuated cantilever structure. The thermal actuation of a top DBR mirror enables to compensate the temperature drift of lasing wavelengths. The temperature dependence of lasing wavelengths could be reduced by adjusting the cantilever length. Also, a T-shape membrane structure was introduced for efficient electro-thermal tuning. Small temperature dependences and continuous wavelength tuning were obtained.
Keywords :
III-V semiconductors; cantilevers; distributed Bragg reflector lasers; gallium arsenide; laser cavity resonators; laser mirrors; laser tuning; membranes; micro-optomechanical devices; quantum well lasers; reviews; surface emitting lasers; DBR mirror; GaAs; MEMS VCSEL; MEMS technology; T-shape membrane structure; athermal operation; cantilever length; electrothermal tuning; lasing wavelength; review; temperature dependence; thermal actuation; thermally actuated cantilever structure; vertical cavity surface emitting lasers; wavelength 850 nm; wavelength athermalization; wavelength control; wavelength engineering; wavelength tuning; Micromechanical devices; Temperature dependence; Tuning; Vertical cavity surface emitting lasers; Wavelength division multiplexing;
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2013 International Conference on
Conference_Location :
Kanazawa
Print_ISBN :
978-1-4799-1512-5
DOI :
10.1109/OMN.2013.6659047
