3D Multichannel Active Neural Microelectrode with Single-Supply Integrate Signal Processing Circuitry

In this paper, we present a 3-Dimension microsensor based on microelectro-mechanical technology and integrate circuitry. This 32-channel microsensor incorporates two active neural probes with signal detection and control ASIC for amplification, site selection and multiplexing. The method of determining the dimensional parameters of the probe shank is also discussed based on the structure and fabrication process of it. The ASIC based on 0.35 um fabrication is integrated with multiplexing and powered by single-supply (3.3 V) to reduce leads number and the complexity of power supply. The ASIC works in recording or stimulating mode, depending on the mode_select signal.