Title :
Miniaturized MOEMS spectrometer technology for gas sensing
Author :
Antila, J. ; Rissanen, Anna ; Mannila, Rami ; Makynen, Jussi ; Nakki, Ismo ; Tuohiniemi, M.
Author_Institution :
VTT Tech. Res. Centre of Finland, Espoo, Finland
Abstract :
VTT has developed a miniaturized mid-IR spectrometer system for gas sensing utilizing a surface micromachined tunable MOEMS Fabry-Perot Interferometer (FPI). The MOEMS FPI enables high-quality spectral measurements using a single-pixel detector, thus avoiding expensive linear array detectors. This measurement scheme increases sensor specificity and robustness compared to conventional Nondispersive Infrared (NDIR) sensors.
Keywords :
Fabry-Perot interferometers; gas sensors; micro-optomechanical devices; VTT; gas sensing; high-quality spectral measurements; miniaturized MOEMS spectrometer technology; miniaturized midinfrared spectrometer system; single-pixel detector; surface micromachined tunable MOEMS Fabry-Perot interferometer; Band-pass filters; Detectors; Optical filters; Optical interferometry; Optical sensors; Wavelength measurement;
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2013 International Conference on
Conference_Location :
Kanazawa
Print_ISBN :
978-1-4799-1512-5
DOI :
10.1109/OMN.2013.6659058
