Title :
Wavelength selective uncooled infrared sensor using triangular-lattice plasmonic absorbers
Author :
Ogawa, Shinichi ; Komoda, Junya ; Masuda, Kohji ; Takagawa, Yousuke ; Kimata, M.
Author_Institution :
Adv. Technol. R&D Center, Mitsubishi Electr. Corp., Amagasaki, Japan
Abstract :
A wavelength selective uncooled infrared (IR) sensor was developed using triangular-lattice plasmonic absorbers (PLA). The triangular-lattice PLA has a Au-based two-dimensional periodic dimple-array with a triangular lattice, where photons can be manipulated using the spoof surface plasmon. A microelectromechanical system (MEMS)-based uncooled IR sensor with triangular-lattice PLA was fabricated using complementary metal oxide semiconductor (CMOS) and micromachining techniques. Measurement of the spectral responsivity demonstrated that selective enhancement of the responsivity can be achieved and that the detection wavelength of the triangular-lattice PLA was shorter than that of the square-lattice PLA due to the differences in lattice structure.
Keywords :
CMOS integrated circuits; gold; infrared detectors; integrated optoelectronics; micro-optomechanical devices; micromachining; microsensors; optical arrays; optical fabrication; optical lattices; plasmonics; sensor arrays; surface plasmons; Au; Au-based two-dimensional periodic dimple-array; CMOS techniques; MEMS; complementary metal oxide semiconductor techniques; detection wavelength; lattice structure; microelectromechanical system-based uncooled IR sensor; micromachining techniques; spectral responsivity; spoof surface plasmon; triangular-lattice plasmonic absorbers; wavelength selective uncooled infrared sensor; Lattices; Optical surface waves; Plasmons; Programmable logic arrays; Surface structures; Surface waves; Wavelength measurement;
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2013 International Conference on
Conference_Location :
Kanazawa
Print_ISBN :
978-1-4799-1512-5
DOI :
10.1109/OMN.2013.6659059
