Title :
Micro-scanning mirrors for high-power laser applications in laser surgery
Author :
Sandner, Thilo ; Kimme, Simon ; Grasshoff, Thomas ; Todt, Ulrich ; Graf, Adam ; Tulea, Christian ; Lenenbach, Achim ; Schenk, Harald
Author_Institution :
AMS, Fraunhofer Inst. for Photonic Microsyst. (IPMS), Dresden, Germany
Abstract :
We present two novel micro scanning mirrors with large aperture and HR dielectric coatings suitable for high power laser applications in a miniaturized laser instrument. An electrostatic driven 2D-raster scanning mirror with 5×7.1mm aperture is used for dynamic steering of the ps-laser beam of the laser cutting process. A second magnetic 2D-beam steering mirror enables a static beam correction of a hand guided laser instrument. Optimizations of a magnetic gimbal micromirror with 6 mm × 8 mm mirror plate are presented; here static deflections of 3° were reached. Both MEMS devices were successfully tested with a high power ps-laser at 532nm up to 20W CW.
Keywords :
beam steering; high-speed optical techniques; laser applications in medicine; laser beam cutting; magnetic devices; micro-optics; mirrors; optical control; surgery; MEMS devices; dynamic ps-laser beam steering; electrostatic driven 2D raster scanning mirror; hand guided laser instrument; high power laser applications; high power ps laser; high reflectance dielectric coating; large aperture microscanning mirrors; laser cutting process; laser surgery; magnetic 2D beam steering mirror; magnetic gimbal micromirror; miniaturized laser instrument; mirror plate; size 6 mm; size 8 mm; static beam correction; static deflection; wavelength 532 nm; Coatings; Laser beam cutting; Magnetic resonance; Magnetomechanical effects; Mirrors; Power lasers;
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2013 International Conference on
Conference_Location :
Kanazawa
Print_ISBN :
978-1-4799-1512-5
DOI :
10.1109/OMN.2013.6659070
