Title :
Optical microring resonators in lithium niobate for classical and quantum microwave photonics
Author :
Deng Jun ; Hussian, Sajid ; Saha, Simanto ; Ching Eng Png ; Mankei Tsang ; Danner, Aaron J.
Author_Institution :
Dept. of Electr. & Comput. Eng., Nat. Univ. of Singapore, Singapore, Singapore
Abstract :
A microring resonator was fabricated in LiNbO3 substrate by annealed proton exchange (APE) method. Measurement results show that thermal annealing is necessary to improve the performance of the channel waveguides. The measured extinction ratio is approximately 13dB. By making use of Cr film as electrodes, a tunability of 2 pm/V is obtained by applying 150V.
Keywords :
annealing; ion exchange; lithium compounds; micro-optomechanical devices; microfabrication; micromechanical resonators; microwave photonics; microwave resonators; optical fabrication; optical films; optical resonators; optical tuning; optical waveguides; quantum optics; APE method; LiNbO3; annealed proton exchange method; channel waveguides; classical microwave photonics; electrodes; extinction ratio; lithium niobate; optical microring resonators; quantum microwave photonics; thermal annealing; thin film; voltage 150 V; Annealing; Electrooptical waveguides; Lithium niobate; Optical device fabrication; Optical ring resonators;
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2013 International Conference on
Conference_Location :
Kanazawa
Print_ISBN :
978-1-4799-1512-5
DOI :
10.1109/OMN.2013.6659073
