2D MEMS scanner with a rotation-angle detector for a time-of-flight image sensor

A moving-magnet-type raster-output 2D MEMS scanner with a rotation-angle detector has been developed. To realize high precision and low temperature dependence, we propose the detector composed of four Hall sensors. By operation the outputs of the four Hall sensors, we enhanced the sensitivity and linearity of the detector, and realized the high precision detector. The fabricated detector achieved the detecting linearity of <; ± 0.11° for movable frame, and <; ± 0.07° for movable mirror at room temperature.