Title :
Dual-axis polymer-MEMS mirror made of Photosensitive Nanocomposite
Author :
Suzuki, Jun ; Miura, Tsuyoshi ; Terao, Kyohei ; Takao, Hidekuni ; Shimokawa, Fusao ; Namazu, T. ; Oohira, Fumikazu ; Suzuki, Takumi
Author_Institution :
Dept. of Intell. Mech. Syst. Eng., Kagawa Univ., Takamatsu, Japan
Abstract :
We propose a simple fabrication method for a dual-axis polymer MEMS mirror made of negative photoresist SU-8 containing magnetic nanoparticles as a magnetically driven actuator. The proposed mirror is driven by magnetic attractive force using external magnetic field. So, it doesn´t need complex wiring patterns and can simply fabricate by photolithography only. For evaluation of drive characteristics of the proposed mirror, we measured static deflection angle and frequency response of the fabricated mirror by using a laser position sensor. As a result, we obtained optical deflection angle ±15deg. and the second resonant frequency 29.2Hz of torsional oscillation.
Keywords :
magnetic particles; micromechanical devices; micromirrors; nanocomposites; nanolithography; nanomagnetics; nanoparticles; optical fabrication; optical polymers; photodetectors; photolithography; photoresists; dual-axis polymer-MEMS mirror; external magnetic field; frequency 29.2 Hz; frequency response; laser position sensor; magnetic attractive force; magnetic nanoparticles; magnetically driven actuator; measured static deflection angle; negative photoresist SU-8; optical deflection angle; photolithography; photosensitive nanocomposite; simple fabrication method; torsional oscillation; Electromagnets; Magnetic resonance; Micromechanical devices; Mirrors; Optical device fabrication; Optical sensors; Polymers;
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2013 International Conference on
Conference_Location :
Kanazawa
Print_ISBN :
978-1-4799-1512-5
DOI :
10.1109/OMN.2013.6659079
