Title :
Quasi-static microscanner with linearized scanning for an adaptive 3D-laser camera
Author :
Sandner, Thilo ; Grasshoff, Thomas ; Schwarzenberg, Markus ; Schenk, Harald
Author_Institution :
Fraunhofer Inst. for Photonic Microsyst. (IPMS), AMS, Dresden, Germany
Abstract :
This paper presents a gimbaled MEMS scanning mirror especially developed for adaptive raster scanning in a novel 3D-ToF laser camera. Substantial quasi-static deflections of ±10° are provided by vertical comb drives in vertical direction in contrast to resonant horizontal scanning of the 2.6×3.6mm elliptical mirror at 1600Hz and 80° FOV. To guarantee the full reception aperture of effective 5mm a synchronized driven array - consisting of five hybrid assembled MEMS devices with integrated position feedback - is used by the 3D camera enabling a distance measuring rate of 1MVoxel/s and an uncertainty of ToF distance measurement of 5mm at 7.5m.
Keywords :
adaptive optics; cameras; distance measurement; integrated optics; laser arrays; laser mirrors; measurement by laser beam; micro-optomechanical devices; micromirrors; optical scanners; 3D-ToF laser camera; ToF distance measurement uncertainty; adaptive 3D-laser camera; adaptive raster scanning; distance 7.5 m; frequency 1600 Hz; gimbaled MEMS scanning mirror; hybrid assembled MEMS devices; integrated position feedback; linearized scanning; quasistatic deflection; quasistatic microscanner; reception aperture; size 5 mm; synchronized driven array; vertical comb drives; vertical direction; Apertures; Arrays; Cameras; Micromechanical devices; Mirrors; Synchronization; Three-dimensional displays;
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2013 International Conference on
Conference_Location :
Kanazawa
Print_ISBN :
978-1-4799-1512-5
DOI :
10.1109/OMN.2013.6659080
