Title :
Surface-micromachined MEMS corner cube retro-reflector array
Author :
Yu-fan Chen ; Hsu-Tang Chang ; Bo-Jiun Chen ; Jui-che Tsai
Author_Institution :
Dept. of Electr. Eng., Nat. Taiwan Univ., Taipei, Taiwan
Abstract :
A linear array of MEMS corner cube retro-reflectors (CCR) fabricated with the MUMPs polysilicon surface micromachining process is presented. The CCR´s opening faces straight upwards, providing ease of use and better field of view. Tunability can be achieved by employing a drivable mirror as one of the CCR´s three mirrors. A novel idea of assembling an N × N CCR array is also proposed.
Keywords :
elemental semiconductors; micro-optomechanical devices; micromachining; micromirrors; optical arrays; optical fabrication; optical tuning; retroreflectors; silicon; CCR array; MUMP polysilicon surface micromachining process; Si; drivable mirror; linear array; surface-micromachined MEMS corner cube retroreflector array; Arrays; Latches; Micromechanical devices; Mirrors; Optical device fabrication; Optical reflection; Optical scattering;
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2013 International Conference on
Conference_Location :
Kanazawa
Print_ISBN :
978-1-4799-1512-5
DOI :
10.1109/OMN.2013.6659081
