Title :
A 3.3 V operated variable transmission attenuator based on subwavelength grating
Author :
Honma, Hiroaki ; Takahashi, Koichi ; Ishii, Hiroyuki ; Ishida, Makoto ; Sawada, Kazuaki
Author_Institution :
Toyohashi Univ. of Technol., Toyohashi, Japan
Abstract :
This paper presents a nanoelectromechanical system (NEMS) variable transmission attenuator based on a gap variable subwavelength grating with a low drive voltage. An array of parallel-plate actuators is deployed over a through hole. The transmitted light intensity decreased from 63.3% to 46.5% with a drive voltage of 3.2 V at a wavelength of 775 nm.
Keywords :
actuators; diffraction gratings; infrared spectra; nanoelectromechanical devices; nanophotonics; optical arrays; optical attenuators; visible spectra; NEMS; drive voltage; gap variable subwavelength grating; nanoelectromechanical system variable transmission attenuator; parallel-plate actuator array; transmitted light intensity; voltage 3.2 V; voltage 3.3 V; wavelength 775 nm; Gratings; Integrated optics; Nanoelectromechanical systems; Optical attenuators; Optical films; Optical sensors;
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2013 International Conference on
Conference_Location :
Kanazawa
Print_ISBN :
978-1-4799-1512-5
DOI :
10.1109/OMN.2013.6659082
