DocumentCode
2164198
Title
Infrared collecting microlens integrated with Si photo cell
Author
Aonuma, Takuro ; Kumagai, Shinya ; Sasaki, Motoharu
Author_Institution
Toyota Tech. Inst., Toyota, Japan
fYear
2013
fDate
18-22 Aug. 2013
Firstpage
123
Lastpage
124
Abstract
Infrared collecting microlens is prepared at the backside of Si photo cell. The preform technique based on the stacked resist layers can give the shape variation of the lens. Not only the simple convex spherical shape but also the combination of the flat center plane and the spherical surrounding ring can be realized. This is for the shorter focus length to combine with IR detector. The Si photo cell realizes the power generation from the visible light.
Keywords
elemental semiconductors; infrared detectors; integrated optics; microlenses; photodetectors; silicon; Si; focus length; infrared collecting microlens; infrared detector; integrated optics; power generation; shape variation; silicon photocell; simple convex spherical shape; spherical surrounding ring; stacked resist layers; visible light; Lenses; Microoptics; Resists; Sensitivity; Shape; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMS and Nanophotonics (OMN), 2013 International Conference on
Conference_Location
Kanazawa
ISSN
2160-5033
Print_ISBN
978-1-4799-1512-5
Type
conf
DOI
10.1109/OMN.2013.6659090
Filename
6659090
Link To Document