Title :
Experimental verification of phononic crystal slab based silicon microresonators
Author :
Nan Wang ; Min Tang ; Fu-Li Hsiao ; Chong Pei Ho ; Palaniapan, Moorthi ; Dim-Lee Kwong ; Chengkuo Lee
Author_Institution :
Dept. of Electr. & Comput. Eng., Nat. Univ. of Singapore, Singapore, Singapore
Abstract :
This paper reports experimentally measured data of two microfabricated resonators, namely a Fabry-Perot (FP) resonator and a reduced central-hole (RCH) resonator, formed by engineering different defects on an otherwise perfect phononic crystal (PnC) slab. Experimental results, which are well supported by the numerically simulated data, show that the RCH resonator has higher Q factor, higher resonant frequency and lower insertion loss than the FP resonator. Finite-element-modelling (FEM) analysed steady-state displacement profiles of the two resonators show that the higher Q factor obtained by the RCH resonator is caused by its superior ability of the energy confinement within the defected region.
Keywords :
Fabry-Perot resonators; Q-factor; elemental semiconductors; finite element analysis; micro-optomechanical devices; microfabrication; micromechanical resonators; optical fabrication; optical losses; phononic crystals; silicon; FEM; Fabry-Perot resonator; Q-factor; Si; energy confinement; finite element modelling; insertion loss; microfabricated resonators; numerical simulation; phononic crystal slab based silicon microresonators; reduced central-hole resonator; resonant frequency; steady-state displacement profiles; Crystals; Finite element analysis; Optical resonators; Q-factor; Resonant frequency; Silicon; Slabs;
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2013 International Conference on
Conference_Location :
Kanazawa
Print_ISBN :
978-1-4799-1512-5
DOI :
10.1109/OMN.2013.6659094
