Current density calculation of a high frequency ion source

The current density of a high frequency charged particle source is calculated using the Child-Langmuir formula and the quantum mechanical transition probability for ionization processes at fixed gas pressure and temperature. The dependence of the current density on the differential ionization coefficient and various geometrical and electromagnetic quantities is taken into account. The fundamental mechanism of the ion source considered is based on the initial natural ionization and on the application of high frequency fields in order to accelerate the electrons and ions against the gas molecules, thus yielding considerable ionization. Plasma physical phenomena are not relevant and the calculation agrees well with experimental data for the range considered.<>