Title :
Displacement-amplified dynamic varifocal mirror using mechanical resonance
Author :
Sasaki, T. ; Sato, Daisuke ; Hane, Kazuhiro
Author_Institution :
Tohoku Univ., Sendai, Japan
Abstract :
We describe a displacement-amplified dynamic varifocal mirror using mechanical resonance. An electrostatically actuated varifocal mirror was fabricated from single crystalline silicon. The diameter and thickness of the mirror were 1 mm and 2 μm, respectively. The estimated ratio of the dynamic to the static displacement was about 50 in the vacuum range from 2 Pa to 50 Pa at the resonance. The laser beam focusing was also demonstrated using the varifocal mirror under the resonance operation.
Keywords :
elemental semiconductors; mirrors; optical fabrication; optical focusing; silicon; Si; displacement-amplified dynamic varifocal mirror; electrostatically actuated varifocal mirror; laser beam focusing; mechanical resonance; optical fabrication; pressure 2 Pa to 50 Pa; single crystalline silicon; size 1 mm; size 2 mum; Electrodes; Laser beams; Laser modes; Measurement by laser beam; Mirrors; Optical imaging; Silicon;
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2013 International Conference on
Conference_Location :
Kanazawa
Print_ISBN :
978-1-4799-1512-5
DOI :
10.1109/OMN.2013.6659109
