Tunable THz filter using 3-D split-ring resonators

Author

Yu-Sheng Lin ; Chong Pei Ho ; Pitchappa, Prakash ; Fusheng Ma ; You Qian ; Kropelnicki, Piotr ; Chengkuo Lee

Author_Institution

Dept. of Electr. & Comput. Eng., Nat. Univ. of Singapore, Singapore, Singapore

fYear

2013

fDate

18-22 Aug. 2013

Firstpage

167

Lastpage

168

Abstract

An electrically tunable MEMS based out-of-plane metamaterials THz filter using stress-induced curved cantilevers to form split-ring resonator in three-dimensional configuration is experimentally demonstrated and characterized. While the achieved tunable range for the resonant frequency is 0.5 THz at 20 volts bias, quality factor of the resonant frequency is improved as well. This MEMS based THz filter using curved cantilevers shows its potential in tunable metamaterials applications such as sensors, optical switches, and filters, etc.

Keywords

Q-factor; cantilevers; micro-optomechanical devices; microwave photonics; optical resonators; optical tuning; 3D split-ring resonators; electrically tunable MEMS; frequency 0.5 THz; out-of-plane metamaterials; quality factor; resonant frequency; stress-induced curved cantilevers; tunable THz filter; voltage 20 V; Magnetic materials; Metamaterials; Optical filters; Optical resonators; Resonant frequency; Resonator filters; Tuning; MEMS; filter; metamaterial;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical MEMS and Nanophotonics (OMN), 2013 International Conference on

Conference_Location

Kanazawa

ISSN

2160-5033

Print_ISBN

978-1-4799-1512-5

Type

conf

DOI

10.1109/OMN.2013.6659112

Filename

6659112