Title :
Tunable THz filter using 3-D split-ring resonators
Author :
Yu-Sheng Lin ; Chong Pei Ho ; Pitchappa, Prakash ; Fusheng Ma ; You Qian ; Kropelnicki, Piotr ; Chengkuo Lee
Author_Institution :
Dept. of Electr. & Comput. Eng., Nat. Univ. of Singapore, Singapore, Singapore
Abstract :
An electrically tunable MEMS based out-of-plane metamaterials THz filter using stress-induced curved cantilevers to form split-ring resonator in three-dimensional configuration is experimentally demonstrated and characterized. While the achieved tunable range for the resonant frequency is 0.5 THz at 20 volts bias, quality factor of the resonant frequency is improved as well. This MEMS based THz filter using curved cantilevers shows its potential in tunable metamaterials applications such as sensors, optical switches, and filters, etc.
Keywords :
Q-factor; cantilevers; micro-optomechanical devices; microwave photonics; optical resonators; optical tuning; 3D split-ring resonators; electrically tunable MEMS; frequency 0.5 THz; out-of-plane metamaterials; quality factor; resonant frequency; stress-induced curved cantilevers; tunable THz filter; voltage 20 V; Magnetic materials; Metamaterials; Optical filters; Optical resonators; Resonant frequency; Resonator filters; Tuning; MEMS; filter; metamaterial;
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2013 International Conference on
Conference_Location :
Kanazawa
Print_ISBN :
978-1-4799-1512-5
DOI :
10.1109/OMN.2013.6659112
