A 3-D movable THz filter using surface micromachining process

Author

Yu-Sheng Lin ; Fusheng Ma ; Chengkuo Lee

Author_Institution

Dept. of Electr. & Comput. Eng., Nat. Univ. of Singapore, Singapore, Singapore

fYear

2013

fDate

18-22 Aug. 2013

Firstpage

169

Lastpage

170

Abstract

We have demonstrated a MEMS based tunable filter with reconfigurable electric split-ring resonators (eSRR) at THz frequencies. This is accomplished by making planar arrays of eSRR with stress curved beams (eSRR-SCBs) which are actuated out-of-plane by electrostatic force. Our results have demonstrated that the eSRR-SCBs possess blue shifting capabilities and polarization dependent state at THz frequencies, while such adaptive metamaterials offer significant potential in realizing novel electromagnetic functionality with diversified applications such as sensors, switches, and filters.

Keywords

micro-optomechanical devices; micromachining; microwave photonics; optical filters; optical metamaterials; optical resonators; 3D movable THz filter; MEMS; adaptive metamaterials; electromagnetic functionality; electrostatic force; out-of-plane actuation; planar arrays; polarization dependent state; reconfigurable electric split-ring resonators; stress curved beams; surface micromachining; Electric fields; Metamaterials; Micromechanical devices; Optical filters; Optical resonators; Resonator filters; Tuning; MEMS; filter; metamaterial;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical MEMS and Nanophotonics (OMN), 2013 International Conference on

Conference_Location

Kanazawa

ISSN

2160-5033

Print_ISBN

978-1-4799-1512-5

Type

conf

DOI

10.1109/OMN.2013.6659113

Filename

6659113