Title :
Micromachined Magnetostatic Wave Resonators
Author :
Sajin, George ; Marcelli, Romolo
Author_Institution :
National Research and Development Institute for Microtechnologies, PO Box 38-160, 72996, Bucharest, Romania. E-mail: gsajin@imt.ro
Abstract :
A frequency tunable magnetostatic wave (MSW) straight edge resonator (SER) made by a YIG film has been used as a selective frequency component in a micromachined resonating filter. Sparameters have been measured at different DC magnetic bias fields, with a frequency tunability between 2 GHz and 6 GHz ca.. An improvement of the performances for the SERs excited by micromachined microstrip transducers has been clearly demonstrated. Moreover, the utilization of silicon membranes to support MSW-SERs offers important openings toward the integration of magnetostatic wave devices with micromachined structures.
Keywords :
Frequency measurement; Magnetic field measurement; Magnetic films; Magnetic separation; Magnetostatic waves; Microstrip; Resonant frequency; Resonator filters; Silicon; Transducers;
Conference_Titel :
Microwave Conference, 2001. 31st European
Conference_Location :
London, England
DOI :
10.1109/EUMA.2001.339122
