Title :
Gate bias induced heating effect and implications for the design of deep submicron ESD protection
Author :
Kwang-Hoon Oh ; Duvvury, Charvaka ; Banerjee, K. ; Dutton, R.W.
Author_Institution :
Center for Integrated Syst., Stanford Univ., CA, USA
Abstract :
This paper presents a detailed investigation of the degradation of ESD strength with gate bias for various deep submicron ESD protection designs. It has been shown for the first time that gate bias induced heating is the primary cause of this degradation. It has also been established that substrate biasing can help eliminate the negative impact of the gate bias effect, which has significant implications for the design of ESD protection circuits in deep submicron technologies.
Keywords :
CMOS integrated circuits; VLSI; electrostatic discharge; integrated circuit design; integrated circuit modelling; protection; thermal analysis; ESD protection circuit design; ESD strength degradation; MEDICI; TSUPREM4; deep submicron ESD protection; deep submicron technologies; electro-thermal simulations; gate bias; gate bias induced heating; output NMOS failure; substrate biasing; Coupling circuits; Degradation; Diodes; Electrostatic discharge; Fingers; Heating; MOS devices; MOSFETs; Protection; Voltage;
Conference_Titel :
Electron Devices Meeting, 2001. IEDM '01. Technical Digest. International
Conference_Location :
Washington, DC, USA
Print_ISBN :
0-7803-7050-3
DOI :
10.1109/IEDM.2001.979496